3D modeling of coherence scanning interferometry on 2D surfaces using FEM
نویسندگان
چکیده
منابع مشابه
Coherence scanning interferometry: linear theory of surface measurement.
The characterization of imaging methods as three-dimensional (3D) linear filtering operations provides a useful way to compare the 3D performance of optical surface topography measuring instruments, such as coherence scanning interferometry, confocal and structured light microscopy. In this way, the imaging system is defined in terms of the point spread function in the space domain or equivalen...
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ژورنال
عنوان ژورنال: Optics Express
سال: 2020
ISSN: 1094-4087
DOI: 10.1364/oe.411167